A plasma electron source designed for generation of a pulsed wide-aperture electron beam in the forevacuum pressure range (5–20 Pa) is described. The source is based on the use of a hollow-cathode glow discharge. At an accelerating voltage of 20 kV,
Features of focusing electron beams generated by a forevacuum plasma source under pressures of 10–30 Pa are investigated and the principle possibility of obtaining submillimeter beams is demonstrated. A beam power density of 105 W/cm2 is reached at a
An insulated target was irradiated by an electron beam generated by a forevacuum plasma electron source operating in the pressure range of 5–15 Pa. Measurements of the target potential showed that plasma formed in the region of electron beam transpor
It is shown that, as the gas pressure in a forevacuum plasma electron source increases, electric breakdown in the accelerating gap is caused by the reverse flow of ions from plasma that is generated by both the electron beam and high-voltage glow dis
The plasma parameters and the emissivity of a ribbon electron beam source based on a discharge with an inhomogeneous extended hollow cathode are measured. A constriction in the cathode cavity increases the plasma density near the emitting area bounda
Results are presented from experimental studies of the formation of focused electron beams produced by extracting electrons from the plasma of a steady-state discharge with a hollow cathode in the forevacuum pressure range. Based on the measurements
A forevacuum plasma electron source is used to generate a beam plasma and measure its parameters in a cylindrical thin-walled quartz bulb. Differences in the gas pressure dependences of the plasma concentration and potential are found when the plasma
Results are presented from experimental studies of the formation of a ribbon electron beam during the extraction of electrons from the plasma of a steady-state hollow-cathode discharge in the forevacuum pressure range. It is shown that the main reaso
The parameters and characteristics of a pulsed arc discharge with a cathode spot used in a forevacuum plasma source of electrons are investigated. It is shown that the accelerating voltage influences arc initiation to a lesser extent compared with an
Based on the principle of vacuum arc discharge under magnetic field, a novel plasma cathode electron- beam source was designed. This device can be used to regulate electron-beam current so as to improve the extrication efficiency of electron beam thr
A Forevacuum Pulse ArcDischargeBased Plasma Electron Source A. V. Kazakov, V. A. Burdovitsin*, A. V. Medovnik, and E. M. Oks Tomsk State University of Control Systems and Radio Electronics, pr. Lenina 40, Tomsk, 634050 Russia *email: [email protected] Received February 12, 2013
Abstract—An arcdischargebased electron source is described, which is designed for forming a pulsed wide aperture electron beam in the forevacuum pressure range (4–15 Pa). At an accelerating voltage of 12 kV, a current of 80 A was extracted from the emitting surface with an area of 80 cm2 in the submillisecond range of pulse durations. The current density distribution over the beam cross section is close to a Gaussian function, and the surfaceaveraged beam energy density in a pulse reached 10 J/cm2. DOI: 10.1134/S0020441213060043
INTRODUCTION Pulsed electron beams with large cross sections are used to modify the surface properties of processed arti cles [1, 2]. The generation of such beams at elevated pressures in the forevacuum pressure range (10– 100 Pa)  made it possible to perform electronbeam processing of the surfaces of electrically nonconduct ing materials, in particular, various ceramics [4, 5]. In the plasma electron source we developed earlier for this purpose , a hollowcathode glow discharge was used to generate emission plasma. Despite a number of fundamental advantages of hollowcathode discharge systems (uniformity and stability of plasma parameters and a low noise level), an excess of a certain threshold level by the discharge current leads to the formation of a cathode spot and a transition to the arc mode. In this transition, a cathode spot randomly arises at any point on the surface of the cathode cavity, and the arcformation process sharply disturbs the plasma uniformity in the cavity, thus finally leading to a breakdown of the accelerating gap. Conditioning (aging) of the electrodes of the dis charge system or pulseduration shortening provides a certain increase in the diffusivedischarge current. However, this current increase is insufficient for numerous applications of a pulsed electron beam, when its effect is determined by the energy density in a single pulse. The problem of limiting the maximum possible current in glowdischargebased pulsed plasma elec tron sources is known; it is conventionally solved by replacing the glow discharge with an arc discharge . Because, in this case, the forced localization of the arc’s cathode spot is provided in a limited region far from the emission plasma surface, this substantially reduces the influence of instabilities, which are inher
ent in the arc discharge on the electronbeam param eters. Evidently, it is also desirable to use an analogous approach in order to further increase the beam current in pulsed electron sources that operate under forevac uum pressures. This paper describes the design of a forevacuum pulsed plasma electron source in which an arc discharge is used to produce emission plasma. PLASMA ELECTRON SOURCE Figure 1 shows the design of the forevacuum pulsed plasma electron source. Cathode 1 of the source is a 5mmdiameter copper rod encased in ceramic tube 2. The tube restricts the working cathode region to its end surface and simultaneously serves as its electrical insulation. Anode 3 (made of copper) of the source is a hollow cylinder whose base has a 90mmdiameter emission window covered with a finestructure mesh (0.3 × 0.3 mm). The accelerating gap is formed by the flat part of the anode and grid electrode–extractor 4, which is attached to the flange of vacuum chamber 5. The anode and extractor grids are made of stainless steel. Caprolon insulator 6 serves for electrical insulation of the anode and extractor. The electron source is placed in the vacuum cham ber, which was evacuated by a mechanical pump. The operating pressure (4–15 Pa) was controlled by sup plying air to the chamber. An arc was stably ignited in the socalled triggerless mode  by an auxiliary discharge over the ceramic surface between cathode 1 and igniter electrode 7, which is electrically connected to the anode through a resistor.
A FOREVACUUM PULSE
1 2 7 3 4 6 5
9 – Iе
to oscillo scope
11 26 Ω
Ib to oscilloscope
Fig. 1. Structure of the electron source and schematic diagram of parameter measurements: (1) cathode, (2) ceramic insulator, (3) anode, (4) extractor, (5) flange of the vacuum chamber, (6) caprolon insulator, (7) igniter electrode, (8) discharge powersup ply unit, (9) powersupply unit of the accelerating gap, (10) probe, (11) metallic shield, (12) beam, and (13) Faraday cup.
Pulse discharge supply unit 8 provided a discharge current amplitude of Id = 40–120 A in the submillime ter range of pulse durations (<1 ms). The pulse repeti tion rate was 1 pulse/s in all experiments. A constant accelerating voltage Ua was formed by powersupply unit 9 and controlled from 1 to 12 kV. Discharge Id, emission Iе, and beam Ib currents were measured using current transformers (Rogowski coils) with sensitivi ties of 50 A/V (discharge and emission currents) and I, A 80 1 60 2 40
300 τ, μs
Fig. 2. Oscillograms of (1) discharge current pulses and (2) electronemission current pulses at an accelerating voltage of 12 kV and a gas pressure of 8 Pa. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES
10 A/V (beam current) the signals from which were fed to a TDS 2004B Tektronix oscilloscope. The electronbeam transport in forevacuum is accompanied by the formation of quite dense plasma near the collector. When electrons and ions from this plasma fall on the collector, the results of measuring the current of the accelerated electron beam may be considerably distorted. Therefore, studies of the char acteristics of the electron source were based on mea surements of the electron emission current Iе, which was recorded in the circuit of the power supply of the accelerating gap. The beam current was evaluated under the assump tion that the emissioncurrent loss at the accelerating grid correspond to its geometrical transparency (70%). The dischargeburning voltage was measured using an HVP15HF resistive divider with a division ratio of 1 : 1000. The beamcurrent density distribution was registered with flat probe 10, which was placed in metal lic grounded shield 11 with a 3mmdiameter collimat ing hole. The probe was fixed on a twocoordinate dis placement system. The radial coordinate r was mea sured from the symmetry axis of the electron source in an interval of from –55 to +55 mm. The vertical coor dinate, i.e., the distance L between the extractor and probe, was measured from 135 to 225 mm. CHARACTERISTICS AND PARAMETERS OF THE ELECTRON SOURCE Experiments showed that the stable arc ignition was observed at voltages of 2–3 kV. Such arcinitiating Vol. 56
KAZAKOV et al. j, А/сm2
Ie, A 100
1.4 70 A
12 Ua, kV
Fig. 3. Current–voltage characteristics of the source at dif ferent discharge currents (figures near the curves). The gas pressure is 8 Pa and the pulse duration is 0.25 ms.
voltages are rather high as compared to those from , and the observed difference is evidently related to the larger length of the interelectrode gap of the auxiliary discharge (2 mm instead of 1 mm). A change from a glow discharge to an arc discharge in the forevacuum plasma electron source had no appreciable effect on the stability and reproducibility of the parameters of a pulsed electron beam. Typical oscillograms of the discharge and electronemission currents are shown in Fig. 2. The emission current reaches values that are close to the discharge current, thus indicating a high extraction efficiency. The clearly pronounced segment of the emission current saturation in the current–voltage characteris tics (CVCs) of the electron source at discharge cur rents of up to 70 A (Fig. 3) unambiguously shows an insignificant contribution of the current of secondary electrons, which are knocked from the emission grid by the reverse ion flow from the region of electron beam acceleration and transport to the total beam cur rent. The nonmonotonic dependence Ie(Ua) for a dis charge current of 120 A is apparently associated with the penetration of the emission plasma into the accel erating gap. A decrease in the gas pressure virtually does not modify the behavior of the CVC but leads to a decrease in the saturation current. The radial currentdensity distribution is an impor tant parameter that characterizes wideaperture elec tron beams. It was observed that, as the beam propa gates, its diameter measured at the distribution half height decreases. As was pointed out in , this decrease may be caused by a distortion in the plane– parallel shape of the accelerating gap owing to the beam plasma, which penetrates through the extractor grid into the accelerating gap. The accelerating voltage in a range of 4–10 kV has almost no effect on the form
40 r, cm
Fig. 4. Radial distributions of the electronbeam current density for different accelerating voltages (figures near the curves). The emission current is 50 A, the gas pressure is 4 Pa, the anode–probe distance is 170 mm, and the pulse duration is 0.25 ms.
of the radial distribution (Fig. 4). This can be consid ered as an advantage of the described source. The source was tested for the attainment of the lim iting parameters, and the following results were obtained. At an accelerating voltage of 12 kV and a pulse duration of up to 1 ms, the emission current could be maintained at a level of 80 A. Our estimates showed that the total energy of the electron in a single pulse was 600 J and the surfaceaveraged beam energy density was as high as 10 J/cm2. These parameters exceed those attained in an anal ogous source on the basis of a hollowcathode glow discharge . In the latter source, stable emission could not be attained at such a pulse duration because of a breakdown of the accelerating gap, which is initi ated by the uncontrolled formation of cathode spots on the walls of the cavity and, as a consequence, dis charge pinching with the subsequent plasma penetra tion into the accelerating gap. Long durations of the beam current pulse made it possible not only to use the developed electron source to modify the surfaces of ceramic articles, but also to use it for bulk sintering of ceramics (in this case, the pulse repetition frequency was 10 pulse/s). The prob lem of nonuniform heating is still unsolved, but the fundamental possibility of sintering a compacted zir conium oxide powder has been experimentally con firmed. ACKNOWLEDGMENTS This study was supported by the Russian Founda tion for Basic Research (project no. 130800175) and the Ministry of Education and Science (project no. 7.3101.2011 and Federal Target Program no. 12.V37.21.0935).
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES
A FOREVACUUM PULSE
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6. Yushkov, Yu.G., Burdovitsin, V.A., Medovnik, A.V., and Oks, E.M., Instrum. Exp. Tech., 2011, vol. 54, p. 226. 7. Oks, E.M., Istochniki elektronov s plazmennym kato dom: fizika, tekhnika, primeneniya (Electron Sources with a Plasma Cathode: Physics, Technique, Applica tions), Tomsk: NTL, 2005. 8. Anders, A., Brown, I.G., McGill, R.A., and Dickin son, M.R., J. Phys. D: Appl. Phys., 1998, vol. 31, p. 584. Translated by A. Seferov